Keeping it Clean: HVAC Systems and Flooring in the Semiconductor Industry

In one of our recent blogs, we explored the complexities of semiconductor manufacturing, highlighting the critical role of cleanrooms and cleanroom panels in the semiconductor industry. However, beyond these essential elements, the chip production industry also relies heavily on HVAC systems and specialized flooring to maintain the overall integrity of cleanrooms.  

In this blog, we will delve into the crucial roles that HVAC systems and flooring play in semiconductor cleanrooms. The semiconductor industry is rapidly evolving, with continuous developments and innovations on the horizon. As semiconductor manufacturing becomes more advanced, cleanrooms must meet stringent standards for material stability and measurement accuracy, which are achieved through precise temperature and humidity control. Given the sensitivity of cleanroom environments to fluctuations in humidity and temperature, dedicated HVAC systems are indispensable.

Fabtech for Fab, Fabtech for Fabless: HVAC in Cleanrooms

Semiconductor manufacturing typically involves two types of facilities: Fab Manufacturing and Fabless Manufacturing. Let us briefly understand these two approaches:

Fab Manufacturing – Fab (short for fabrication), involves owning semiconductor fabrication plants (fabs) where chips are manufactured.

Fabless Manufacturing – In this model, companies design semiconductor chips but outsource the fabrication process to a specialized foundry that produces integrated circuits.

HVAC systems in the semiconductor industry are vital for maintaining ISO Class 1 to Class 5 cleanroom classifications, using ULPA or HEPA filters for laminar airflow, or preventing particulate contamination. These systems ensure precise temperature control within ±0.1°C to avoid thermal expansion and contraction during critical processes like photolithography. HVAC also maintains humidity levels between 30-50% to prevent condensation and electrostatic discharge (ESD), safeguarding both equipment and personnel comfort.  

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While both Fab and Fabless facilities equally need HVAC systems to operate efficiently, there are distinct considerations for each: 

HVAC in Fab Manufacturing

Airflow and Pressure

Laminar flow ensures unidirectional airflow to minimize turbulence and particle spread. The positive pressure maintains pressure differentials (typically 15-25 Pa) to prevent contamination from adjacent areas.

Chemical and Gas Control

HVAC uses activated carbon or chemisorption filters to remove airborne molecular contaminants (AMCs). It also captures and exhausts hazardous fumes and volatile organic compounds (VOCs) at the source.

PCB (Printed Circuit Board) Assembly

During printed circuit board assembly (PCBA), HVAC ventilation equipment like mist collectors maintains indoor air quality, especially during the etching of circuit boards.

Vibration Isolation

HVAC systems incorporate dampening mechanisms to protect sensitive equipment from external vibrations and reduce noise interference through sound-absorbing materials and duct designs.

HVAC in Fabless Manufacturing

Data Centres and Server Rooms 

HVAC systems have a precise cooling system that prevents IT infrastructure from overheating. The hot aisle/cold aisle containment improves the cooling efficiency.

Laboratories and Testing Facilities

Consistent temperature and humidity levels prevent test variability in test data. HEPA filters maintain controlled environments for accurate testing and validation of semiconductor designs.

ESD Control

HVAC systems use ionizers to neutralize static in areas handling sensitive components, providing ESD-safe workbenches and flooring.

Ventilation and Chemical Safety

In testing labs, HVAC systems act as local exhaust systems, safely removing fumes, dust, and other contaminants, thus maintaining air quality and protecting employee health. 

In both Fab and Fabless manufacturing, HVAC systems reduce heating and cooling loads, enhancing energy efficiency. Fabtech’s HVAC systems are clean air solutions that can be optimized based on occupancy and real-time needs, ensuring adequate ventilation to maintain air quality and employee well-being. 

Flooring in Semiconductor Cleanrooms – Fine Finishes by Fabtech

The semiconductor industry demands specialized flooring to maintain highly controlled environments. Fabtech’s expertise in flooring solutions spans various sectors, including cleanroom for semiconductor industries. Below are some of the most common flooring options we offer:

Electrostatic Discharge (ESD) Flooring or Anti-Static Flooring

These floorings feature conductive and dissipative properties. Conductive flooring allows static electricity to flow directly to the ground, while dissipative flooring provides a controlled path for static charges to dissipate safely, preventing static build-up. These floors are easy to clean, and dust and moisture-resistant, making them ideal for maintaining a clean, dust-free, waterproof environment. 

Static Dissipative Heat Welded Vinyl Flooring

This flooring combines vinyl’s durability with static dissipative capabilities. It is designed to control and dissipate static electricity that can damage sensitive electronic components during manufacturing.

The heat-welding process creates a seamless and impermeable surface, enhancing cleanliness and preventing dust, particles, and contaminants accumulation. Its stable and non-slip surface also ensures workplace safety. 

Raised Cleanroom Flooring

The raised space allows for the routing of electrical cables, data lines, and plumbing while enabling ULPA-filter air to travel vertically from the cleanroom ceiling panels in a straight path, drawing out under the raised floor, and providing optimum laminar flow. This flooring supports heavy loads, resists spilled liquids, and provides excellent dust control and cleaning. The access floor can be easily lifted to provide access to the space below for maintenance or upgrades without disrupting the cleanroom infrastructure. When combined with static-dissipative or conductive materials, raised cleanroom flooring also helps control electrostatic discharge (ESD), which is critical in semiconductor cleanroom design and manufacturing.

HVAC systems and flooring are essential foundations for maintaining the integrity of semiconductor cleanroom systems. The absence of either component could compromise the cleanroom environment, affecting the quality and reliability of semiconductor manufacturing processes.

Fabtech, as a cleanroom equipment manufacturer, has a sound understanding of the criticality of cleanroom performance, thus offering tailored HVAC systems and flooring solutions for cleanrooms. Our services and solutions are designed to keep your organization in perspective, allowing you to focus on your core manufacturing processes. These services extend from start to finish, offering you expert consulting and engineering solutions for complete turnkey projects. In a journey spanning around 3 decades, Fabtech has delivered solutions that have exceeded clients’ expectations, inspiring us to explore opportunities and stride continually. 

Being acutely aware of the evolution and requirements of the semiconductor industry in the ever-changing world, our experts are here to guide you in making your project meet the highest quality standards.

Please fill out the form below to learn more about our services and how we can assist you with your next project.